Structure defines properties!

However, most frequently the structure of different materials and objects cannot be resolved with a naked eye. To visualize this power of “the unseen world” the Electron Microscopy is usually utilized.

Electron Microscopy unities a family of a few different techniques used for the morphological studies and microanalysis, such as Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM), Energy Dispersive X-Ray Spectroscopy (EDS), Electron Backscattered Diffraction (EBSD) and etc.


The SEM provides the topographical information, while the TEM is resolving the fine structure of the materials. Besides imaging, the electron microscopy can be also creative.

For example, when the SEM is combined with the Focused Ion Beam (FIB) and the Gas Injection Systems (GIS), in situ modification of the samples can be performed, including cross-sectioning, fabrication of the ultra-thin specimens for the TEM analysis, large-volume 3D reconstruction, microelectronic circuit editing and even local growth of the new functional materials via Electron- and Ion-Beam-Induced Deposition (EBID / IBID).


Aberration corrected Scanning Transmission Electron Microscopy (STEM) provides an opportunity for studies of the atomic structure of materials with sub-Ångström resolution. Electron Energy Loss Spectroscopy (EELS), in combination with STEM, is a powerful technique for obtaining information about the chemical and electronic nature of a specimen.


Electron diffraction and particularly methods for obtaining three dimensional diffraction data, has evolved to a powerful tool for the determination of crystal structures from small crystals in the sub-micrometer range.


In this workshop, an overview of the above mentioned methods will be provided including theoretical background, demonstration of the experimental data collection at the Themis Z TEM microscope, as well as an introduction to the data analysis.